Short-pulse laser crystallization and structuring of a-Ge

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 930-933

  Mulato, M ^a,b   Toet, D ^a   Aichmayr, G ^a   Spangenberg, A ^a   Santos, P V ^a   Chambouleyron, I ^b  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Crystallization; Germanium; Raman spectra; Transient effects

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; LASER PULSES; POLYCRYSTALLINE MATERIALS; PULSED LASER APPLICATIONS; RAMAN SCATTERING; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; THIN FILMS; TRANSIENTS;

SHORT PULSE LASER CRYSTALLIZATION;

SEMICONDUCTING GERMANIUM;

EID: 0032064328     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00212-9     Document Type: Article

References (11)

1. M. Heintze, P.V. Santos, C.E. Nebel, M. Stutzmann, Appl. Phys. Lett. 64 (1994) 3148.
2. R.L. Chapman, J.C.C. Fan, H.J. Zeiger, R.P. Gale, Appl. Phys. Lett. 37 (1980) 292.
3. C. Césari, G. Nihoul, J. Marfaing, W. Marine, B. Mutaftschiev, Surf. Sci. 162 (1985) 724.
4. R.K. Sharma, S.K. Bansal, R. Nath, G.P. Srivastava, Thin Solid Films 97 (1982) 1.
5. M. Mulato, D. Toet, G. Aichmayr, P.V. Santos, I. Chambouleyron, Appl. Phys. Lett. 70 (1997) 3570.
6. M. Mulato, D. Toet, G. Aichmayr, P.V. Santos, I. Chambouleyron, in print.
7. D. Toet, B. Koopmans, B. Richards, P.V. Santos, R. Bergman, Proc. of the 23rd ICPS, in: M. Sheffer, R. Zimermann (Eds.), World Scientific, Singapore, 1996, p. 1123.
8. G.E. Jellison Jr., D.H. Lowndes, Appl. Phys. Lett. 51 (1987) 352.
9. E. Anastassakis, E. Liarokapis, J. Appl. Phys. 62 (1987) 3346.
10. I.H. Campbell, P.M. Fauchet, Solid State Commun. 58 (1986) 739.
11. H. Richter, Z.P. Wang, L. Ley, Solid State Commun. 39 (1981) 625.