Thermal modeling of a double-neck large diameter crystal growth process

IEEE transactions on components, packaging and manufacturing technology. Part C. Manufacturing

Volumn 21, Issue 2, 1998, Pages 90-96

  Lee, Tien Yu Tom ^a   Chiou, Herng Der ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); HEAT CONDUCTION; MATHEMATICAL MODELS; TEMPERATURE DISTRIBUTION; TENSILE STRENGTH; TORSIONAL STRESS; YIELD STRESS;

DASH THIN NECK TECHNIQUE; DOUBLE NECK LARGE DIAMETER CRYSTAL GROWTH;

CRYSTAL GROWTH FROM MELT;

EID: 0032050459     PISSN: 10834400     EISSN: None     Source Type: Journal    
DOI: 10.1109/3476.681384     Document Type: Article

References (10)

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10. G. Williams R. E. Reusser Heat transfer in silicon Czochralski crystal growth J. Cryst. Growth 64 448 460 1983