Scattering and recoiling imaging spectrometer (SARIS)

Review of Scientific Instruments

Volumn 69, Issue 4, 1998, Pages 1676-1684

  Kim, C ^a   Hofner C ^a   Al Bayati, A ^a,b   Rabalais, J W ^a  

^a University of Houston   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPOSITION; GONIOMETERS; IMAGING TECHNIQUES; ION BEAMS; IONS; STATISTICS; SURFACE STRUCTURE; SURFACES; VACUUM APPLICATIONS;

MICROCHANNEL PLATE DETECTOR; MULTIPLE STOP TIME TO DIGITAL CONVERTER; SCATTERING AND RECOILING IMAGING SPECTROMETER; SPATIAL DISTRIBUTION PATTERN; TIME OF FLIGHT SPECTRA;

SPECTROMETERS;

EID: 0032049977     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148826     Document Type: Article

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