Electrical characterization of a thin film tin oxide sensor array for VOCs detection

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 429-431

  Gutierrez J ^a   Getino, J ^a   Horrillo, M C ^a   Ares L ^a   Robla, J I ^a   Garcia C ^a   Sayago, I ^a  

^a Consejo Superior de Investigaciones Científicas   (Spain)

Author keywords

Impedance spectroscopy; Sensor arrays; Volatile organic compounds

Indexed keywords

ALUMINUM; ELECTRIC VARIABLES MEASUREMENT; PALLADIUM; PLATINUM; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DOPING; SPECTROSCOPY; SPUTTERING; THIN FILMS; VOLATILE ORGANIC COMPOUNDS;

IMPEDANCE SPECTROSCOPY; REACTIVE SPUTTERING TECHNIQUE; SENSOR ARRAYS;

SENSORS;

EID: 0032049246     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00636-6     Document Type: Article

References (6)

1. J.W. Gardner, Sensors Actuators B 4 (1991) 109.
2. J.W. Gardner, E.L. Hines, H.C. Tang, Sensors Actuators B 9 (1992) 9.
3. J. Getino, M.C. Horrillo, J. Gutiérrez, L. Arés, J.I. Robla, C. García, I. Sayago, Sensors Actuators B 43 (1997) 200.
4. J. Gutiérrez, L. Arés, M.C. Horrillo, I. Sayago, J. Agapito, L. López, Sensors Actuators B 4 (1991) 359.
5. F.J. Gutiérrez, L. Arés, J.I. Robla, M.C. Horrillo, I. Sayago, J.A. Agapito, Sensors Actuators B 7 (1992) 609.
6. M.C. Horrillo, J. Getino, J. Gutiérrez, L. Arés, J.I. Robla, C. García, I. Sayago, J. Rodrigo, Proc. 10th European Conference on Solid-State Transducers, Leuven, 1996.