-
1
-
-
5244340635
-
"Plasma production using a Standing helicon wave,"
-
R. W. Boswell, "Plasma production using a Standing helicon wave," Phys. Lett., vol. 33A, pp. 457-58, 1970.
-
(1970)
Phys. Lett.
, vol.33
, pp. 457-58
-
-
Boswell, R.W.1
-
2
-
-
0013383818
-
"Some features of RF excited fully ionized low pressure argon plasma,"
-
R. Boswell, R. Porteous, A. Prytz, A. Bouchoule, and P. Ranson, "Some features of RF excited fully ionized low pressure argon plasma," Phys. Lett., vol. 91 A, pp. 163-166, 1970.
-
(1970)
Phys. Lett.
, vol.91
, pp. 163-166
-
-
Boswell, R.1
Porteous, R.2
Prytz, A.3
Bouchoule, A.4
Ranson, P.5
-
3
-
-
36149032242
-
"Plasma ionization by helicon waves,"
-
F. F. Chen, "Plasma ionization by helicon waves," Plasma Phys. Control Fusion, vol. 33, pp. 339-364, 1991.
-
(1991)
Plasma Phys. Control Fusion
, vol.33
, pp. 339-364
-
-
Chen, F.F.1
-
4
-
-
0001911317
-
"Plasma production by helicon waves,"
-
T. Shoji, Y. Sakawa, S. Nakazawa, K. Kadota, and T. Sato, "Plasma production by helicon waves," Plasma Sources Sei. Technol, vol 2, pp. 5-10, 1993.
-
(1993)
Plasma Sources Sei. Technol
, vol.2
, pp. 5-10
-
-
Shoji, T.1
Sakawa, Y.2
Nakazawa, S.3
Kadota, K.4
Sato, T.5
-
5
-
-
0028549759
-
"Resonance wave discharge and collisional energy absorption in helicon plasma source,"
-
K. P. Shamrai and V. B. Taranov, "Resonance wave discharge and collisional energy absorption in helicon plasma source," Plasma Phys. Control Fusion, vol 36, pp. 1719-1735, 1994.
-
(1994)
Plasma Phys. Control Fusion
, vol.36
, pp. 1719-1735
-
-
Shamrai, K.P.1
Taranov, V.B.2
-
6
-
-
84956038204
-
"Helicon plasma source excited by a flat spiral coil,"
-
J. E. Stevens, M. J. Sowa, and J. L. Cecchi, "Helicon plasma source excited by a flat spiral coil," J. Vac. Sei. Technol. A, vol. 13, pp. 2476-2482, 1995.
-
(1995)
J. Vac. Sei. Technol. a
, vol.13
, pp. 2476-2482
-
-
Stevens, J.E.1
Sowa, M.J.2
Cecchi, J.L.3
-
7
-
-
0000681854
-
"A study on ion energy distribution functions and plasma potentials in helicon wave plasmas,"
-
J. H. Kim and H. Y. Chang, "A study on ion energy distribution functions and plasma potentials in helicon wave plasmas," Phys. Plasmas, vol. 3, pp. 1462-1469, 1996.
-
(1996)
Phys. Plasmas
, vol.3
, pp. 1462-1469
-
-
Kim, J.H.1
Chang, H.Y.2
-
8
-
-
0001378447
-
"The absorption mechanisms of whistler waves in cool, dense, cylindrically bounded plasmas,"
-
B. M. Harvey and C. N. Lashmore-Davies, "The absorption mechanisms of whistler waves in cool, dense, cylindrically bounded plasmas," Phys. Fluids, vol. B5, pp. 3864-3875, 1993.
-
(1993)
Phys. Fluids, Vol. B
, vol.5
, pp. 3864-3875
-
-
Harvey, B.M.1
Lashmore-Davies, C.N.2
-
9
-
-
34648837822
-
"Very efficient plasma generation by whistler waves near the lower hybrid frequency,"
-
R. W. Boswell, "Very efficient plasma generation by whistler waves near the lower hybrid frequency," Plasma Phys. Control Fusion, vol 26, pp. 1147-1162, 1984.
-
(1984)
Plasma Phys. Control Fusion
, vol.26
, pp. 1147-1162
-
-
Boswell, R.W.1
-
10
-
-
3743136788
-
"Plasma production in a toroidal heliac by helicon waves,"
-
P. K. Loewenhardt, B. D. Blackwell, R. W. Boswell, G. D. Conway, and D. M. Hamberger, "Plasma production in a toroidal heliac by helicon waves," Phys. Rev. Lett., 1991, pp. 2792-2794.
-
(1991)
Phys. Rev. Lett.
, pp. 2792-2794
-
-
Loewenhardt, P.K.1
Blackwell, B.D.2
Boswell, R.W.3
Conway, G.D.4
Hamberger, D.M.5
-
11
-
-
33744745046
-
"Ar II laser generated by landau damping of whistler waves at the lower hybrid frequency,"
-
P. Zhu and R. W. Boswell, "Ar II laser generated by landau damping of whistler waves at the lower hybrid frequency," Phys. Rev. Lett., vol. 63, pp. 2805-2807, 1989.
-
(1989)
Phys. Rev. Lett.
, vol.63
, pp. 2805-2807
-
-
Zhu, P.1
Boswell, R.W.2
-
12
-
-
0000634360
-
"The application of helicon source to plasma processing,"
-
A. J. Perry, D. Vender, and R. W. Boswell, "The application of helicon source to plasma processing,"/ Vac. Sei. Technol. B, vol 9, pp. 310-317, 1991.
-
(1991)
Vac. Sei. Technol. B
, vol.9
, pp. 310-317
-
-
Perry, A.J.1
Vender, D.2
Boswell, R.W.3
-
13
-
-
0001339212
-
"Dynamic plasma behavior excited by
-
S. Shinohara, Y. Miyauchi, and Y. Kawai, "Dynamic plasma behavior excited by m = ±1 helicon wave," Plasma Phys. Control Fusion, vol. 37, pp. 1015-1030, 1995.
-
(1995)
M = ±1 Helicon Wave," Plasma Phys. Control Fusion
, vol.37
, pp. 1015-1030
-
-
Shinohara, S.1
Miyauchi, Y.2
Kawai, Y.3
-
14
-
-
0001235209
-
"A simple analysis of an inductively RF discharge,"
-
R. B. Piejak, V. A. Godyak, and B. M. Alexandrovich, "A simple analysis of an inductively RF discharge," Plasma Sources Sei. Technol., vol. 1, pp. 179-186, 1992.
-
(1992)
Plasma Sources Sei. Technol.
, vol.1
, pp. 179-186
-
-
Piejak, R.B.1
Godyak, V.A.2
Alexandrovich, B.M.3
-
15
-
-
84955048179
-
"In situ simultaneous radio frequency discharge power measurements,"
-
V. A. Godyak and R. B. Piejak, "In situ simultaneous radio frequency discharge power measurements," J. Vac. Sei. Technol. A, vol. 8, pp. 3833-3837, 1990.
-
(1990)
J. Vac. Sei. Technol. a
, vol.8
, pp. 3833-3837
-
-
Godyak, V.A.1
Piejak, R.B.2
-
16
-
-
84957342724
-
"Experiments on helicon plasma sources,"
-
F. F. Chen, "Experiments on helicon plasma sources," J. Vac. Sei. Technol. A. vol. 10, pp. 1389-1401, 1992.
-
(1992)
J. Vac. Sei. Technol. A.
, vol.10
, pp. 1389-1401
-
-
Chen, F.F.1
-
17
-
-
0000788547
-
"Plasma production from helicon waves,"
-
A. W. Degeling, C. O. Jung, R. W. Boswell, and A. R. Ellingboe, "Plasma production from helicon waves," Phys. Plasmas, vol. 3, no. 7, pp. 2788-2796, 1996.
-
(1996)
Phys. Plasmas
, vol.3
, Issue.7
, pp. 2788-2796
-
-
Degeling, A.W.1
Jung, C.O.2
Boswell, R.W.3
Ellingboe, A.R.4
-
18
-
-
0042094341
-
-
J. H. Kirn, S. M. Yun, and H. Y. Chang, "M = +1 mode helicon wave excitation using solenoid antenna," Phys. Lett., vol. A221, pp. 94-98, 1996.
-
(1996)
"M = +1 Mode Helicon Wave Excitation Using Solenoid Antenna," Phys. Lett.
, vol.221
, pp. 94-98
-
-
Kirn, J.H.1
Yun, S.M.2
Chang, H.Y.3
-
19
-
-
0030418237
-
"m = ±1 and m = ±2 mode helicon wave excitation,"
-
"m = ±1 and m = ±2 mode helicon wave excitation," IEEE Trans. Plasma Sei., vol. 24, pp. 1364-1370, 1996.
-
(1996)
IEEE Trans. Plasma Sei.
, vol.24
, pp. 1364-1370
-
-
-
20
-
-
36149028331
-
"Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge,"
-
V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, "Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge," Plasma Sources Sei. Technol., vol. 3, pp. 169-176, 1994.
-
(1994)
Plasma Sources Sei. Technol.
, vol.3
, pp. 169-176
-
-
Godyak, V.A.1
Piejak, R.B.2
Alexandrovich, B.M.3
|