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Volumn 318, Issue 1-2, 1998, Pages 265-269
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Epitaxial piezoelectric PZT thin films obtained by pulsed laser deposition
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Author keywords
Piezoelectric properties; Pulsed laser deposition; PZT thin films
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Indexed keywords
CRACK INITIATION;
CRYSTAL ORIENTATION;
CRYSTALLOGRAPHY;
DEPOSITION;
EPITAXIAL GROWTH;
GOLD;
LASER ABLATION;
LEAD COMPOUNDS;
PIEZOELECTRIC MATERIALS;
PULSED LASER APPLICATIONS;
SILICON;
THIN FILMS;
ENERGY DISPERSIVE SPECTROSCOPY;
LEAD ZIRCONATE TITANATE;
PULSED LASER DEPOSITION;
DIELECTRIC FILMS;
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EID: 0032047648
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)01187-5 Document Type: Article |
Times cited : (14)
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References (17)
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