Integrated micro-optomechanical laser beam deflector

Electronics Letters

Volumn 34, Issue 9, 1998, Pages 881-882

  Petroz, K ^a   Grateau, H ^a   Ollier, E ^a   Mottier, P ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; ETCHING; INTEGRATED OPTICS; LASER BEAM EFFECTS; MICROMACHINING; OPTICAL INSTRUMENT LENSES; SEMICONDUCTING SILICON; SILICA;

LASER BEAM MICRODEFLECTORS;

LASER ACCESSORIES;

EID: 0032047483     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980594     Document Type: Article

References (3)

1. TIEN, N.C., SOLGAARD, O., KIANG, M.-H., DANEMAN, M., LAU, K.Y., and MULLER, R.S.: 'Surface micromachined micromirrors for laser-beam positioning'. Transducers'95-Eurosensors IX, Stockholm, Sweden, 1995
2. IKEDA, M., GOTO, H., SAKATA, M., WAKABAYASHI, S., IMANAKA, K., TAKEUSHI, M., and YADA, T.: 'Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor'. Transducers'95-Eurosensors IX, Stockholm, Sweden, 1995
3. OLLIER, E., and MOTTIER, P.: 'Integrated electrostatic micro-switch for optical fibre networks driven by low voltage', Electron. Lett., 1996, 32, (21), pp. 2007-2009