Defects and energy accommodation in epitaxial sputter deposited Mo/W superlattices studied by molecular dynamics

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 10-13

  Carlberg, M H ^a   Chirita, V ^a   Munger E P ^a  

^a LINKÖPING INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Epitaxial sputter; Molecular dynamics; Superlattices

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; ION BOMBARDMENT; MOLECULAR DYNAMICS; MOLYBDENUM; MONOLAYERS; POINT DEFECTS; SPUTTER DEPOSITION; TUNGSTEN;

EMBEDDED ATOM METHOD; IRRADIATION EFFECTS;

SUPERLATTICES;

EID: 0032046557     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00653-6     Document Type: Article

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