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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volumn 64, Issue 4, 1998, Pages 546-551
Development of ultraprecision table for ductile mode cutting
Author keywords

Brittle material; Ductile mode cutting; Feedback control; nm level positioning; Rigidity; Straightness; Ultraprecision table
Indexed keywords

BRITTLENESS; DUCTILITY; FEEDBACK CONTROL; MECHANICAL VARIABLES CONTROL; PRECISION ENGINEERING; THREE TERM CONTROL SYSTEMS;
EID: 0032046445     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.64.546     Document Type: Article
Times cited : (2)
References (14)
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    • Time-resolved Fractoluminescence Spectra of Silica Glass in a Vacuum and Nitrogen Atmosphere
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.