Evaluation of thermal evaporation conditions used in coating aluminum on near-field fiber-optic probes

Review of Scientific Instruments

Volumn 69, Issue 4, 1998, Pages 1747-1752

  Hollars, Christopher W ^a   Dunn, Robert C ^a  

^a UNIVERSITY OF KANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ALUMINUM; COATINGS; COMPOSITION; DEPOSITION; EVAPORATION; PROBES; SURFACE ROUGHNESS; THERMAL EFFECTS;

NEAR FIELD FIBER OPTIC PROBE; OPTICAL QUALITY; THERMAL EVAPORATION;

ATOMIC FORCE MICROSCOPY;

EID: 0032046056     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148836     Document Type: Article

References (47)

1. E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, and R. L. Kostelak, Science 251, 1468 (1991).
2. E. Betzig and J. K. Trautman, Science 257, 189 (1992).
3. D. W. Pohl, in Advances in Optical and Electron Microscopy, edited by T. Mulvey and C. J. R. Sheppard (Academic, London, 1991), Vol. 12, pp. 243-312.
4. X. S. Xie and R. C. Dunn, Science 265, 361 (1994).
5. J. K. Trautman, J. J. Macklin, L. E. Brus, and E. Betzig, Nature 369, 40 (1994).
6. W. P. Ambrose, P. M. Goodwin, J. C. Martin, and R. A. Keller, Science 265, 364 (1994).
7. E. Betzig and R. J. Chichester, Science 262, 1422 (1993).
8. D. A. Higgins and P. F. Barbara, J. Phys. Chem. 99, 3 (1995).
9. S. K. Kook and R. Kopelman, J. Phys. Chem. 96, 10 672 (1992).
10. H. F. Hess, E. Betzig, T. D. Harris, L. N. Pfeiffer, and K. W. West, Science 264, 1740 (1994).
11. S. K. Buratto, J. W. P. Hsu, J. K. Trautman, E. Betzig, R. B. Bylsma, C. C. Bahr, and M. J. Cardillo, J. Appl. Phys. 76, 7720 (1994).
12. R. D. Grober, T. D. Harris, J. K. Trautman, E. Betzig, W. Wegscheider, L. Pfeiffer, and K. West, Appl. Phys. Lett. 64, 1421 (1994).
13. R. C. Dunn, G. H. Holtom, L. Mets, and X. S. Xie, J. Phys. Chem. 98, 3094 (1994).
14. E. Betzig, R. J. Chichester, F. Lanni, and D. L. Taylor, Bioimaging 1, 129 (1993).
15. C. E. Talley, G. Cooksey, and R. C. Dunn, Appl. Phys. Lett. 69, 3809 (1996).
16. H. Muramatsu, N. Chiba, K. Homma, K. Nakajima, T. Ataka, S. Ohta, A. Kusumi, and M. Fujihira, Appl. Phys. Lett. 66, 3245 (1995).
17. G. A. Valaskovic, M. Holton, and G. H. Morrison, Appl. Opt. 34, 1215 (1995).
18. P. B. Barna, F. M. Reicha, G. Barcza, L. Gosztola, and F. Koltai, Vacuum 33, 25 (1983).
19. N. K. Sandle and H. Wilman, J. Phys. D: Appl. Phys. 6, 1025 (1973).
20. C. W. B. Martinson and S. A. Flodstrom, Surf. Sci. 80, 306 (1979).
21. C. W. B. Martinson, S. A. Flodstrom, J. Rundgren, and P. Westrin, Surf. Sci. 89, 102 (1979).
22. W. Eberhardt and C. Kunz, Surf. Sci. 75, 719 (1978).
23. W. H. Krueger and S. R. Pollack, Surf. Sci. 30, 280 (1972).
24. W. H. Krueger and S. R. Pollack, Surf. Sci. 30, 263 (1972).
25. M. J. Verkerk and W. A. M. C. Brankaert, Thin Solid Films 139, 77 (1986).
26. A. Barna, P. B. Barna, G. Radnoczi, F. M. Reicha, and L. Toth, Phys. Status Solidi A 55, 427 (1979).
27. R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).
28. G. Hass, W. R. Hunter, and R. Tousey, J. Opt. Soc. Am. 47, 1070 (1957).
29. J. E. Curran, J. S. Page, and U. Pick, Thin Solid Films 97, 259 (1982).
30. J. H. Halford and F. K. Chin, J. Opt. Soc. Am. 63, 786 (1973).
31. H. A. Bethe, Phys. Rev. 66, 163 (1944).
32. C. J. Bouwkamp, Philips Res. Rep. 5, 401 (1950).
33. C. W. Hollars and R. C. Dunn, J. Phys. Chem. 101, 6313 (1997).
34. G. Hass, W. R. Hunter, and R. Tousey, J. Opt. Soc. Am. 46, 1009 (1956).
35. G. Hass, J. Opt. Soc. Am. 45, 945 (1955).
36. R. W. Fane and W. E. J. Neal, J. Opt. Soc. Am. 60, 790 (1970).
37. J. R. Black, Natl. Bur. Stand. Spec. Pub. 337, 398 (1970).
38. S. Dushman, Scientific Foundations of Vacuum Technique (Wiley, New York, 1962).
39. G, Hass and J. E. Waylonis, J. Opt. Soc. Am. 51, 719 (1961).
40. N. G. Dhere and T. P. Arsenio, Thin Solid Films 30, 267 (1975).
41. P. Glaser and E. Szigeti, Vacuum 33, 31 (1983).
42. G. Dorey, Surf. Sci. 27, 311 (1971).
43. D. N. Popov, T. K. Kotlarova, T. D. Uzunov, and V. N. Gaydarova, Vacuum 38, 1015 (1988).
44. I. Langmuir, J. Am. Chem. Soc. 35, 105 (1913).
45. I. Langmuir, J. Am. Chem. Soc. 37, 417 (1915).
46. R. W. Springer and D. S. Catlett, J. Vac. Sci. Technol. 15, 210 (1978).
47. J. D. Reimer, J. Vac. Sci. Technol. A 2, 242 (1984).