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Volumn 149, Issue 4-6, 1998, Pages 213-216

Precision small angle measurements with a digital moiré technique

Author keywords

Digital moir ; Metrology; Talbot self images

Indexed keywords

DIFFRACTION GRATINGS; IMAGING TECHNIQUES; LIGHT; MEASUREMENTS; OPTICS;

EID: 0032045904     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(98)00021-2     Document Type: Article
Times cited : (24)

References (10)
  • 10
    • 0004189673 scopus 로고
    • E. Wolf (Ed.), Elsevier, Amsterdam
    • K. Patorski, in: E. Wolf (Ed.), Progress in Optics, vol. XXVII, Elsevier, Amsterdam, 1989.
    • (1989) Progress in Optics , vol.27
    • Patorski, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.