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Volumn 149, Issue 4-6, 1998, Pages 213-216
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Precision small angle measurements with a digital moiré technique
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Author keywords
Digital moir ; Metrology; Talbot self images
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Indexed keywords
DIFFRACTION GRATINGS;
IMAGING TECHNIQUES;
LIGHT;
MEASUREMENTS;
OPTICS;
DIGITAL MOIRE;
TALBOT SELF-IMAGES;
CRYSTAL MICROSTRUCTURE;
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EID: 0032045904
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-4018(98)00021-2 Document Type: Article |
Times cited : (24)
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References (10)
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