Effect of Zr/Ti ratio on the reliability characteristics behavior of Sol-Gel derived PZT films on Pt/lrO2 electrode

IEICE Transactions on Electronics

Volumn E81-C, Issue 4, 1998, Pages 528-535

  Matsuura, Katsuyoshi ^a   Takai, Kazuaki ^a   Tamura, Tetsuro ^a   Ashida, Hiroshi ^a   Otani, Scigen ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Iro2; Pzt, sol gel; Reliability; Zr ti ratio

Indexed keywords

CAPACITORS; CRYSTAL ORIENTATION; FERROELECTRIC MATERIALS; GRAIN SIZE AND SHAPE; IRIDIUM COMPOUNDS; RANDOM ACCESS STORAGE; RELIABILITY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; X RAY CRYSTALLOGRAPHY;

IMPRINT PROPERTY;

THIN FILMS;

EID: 0032045831     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)

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