Electrochemical modifications at the nanometer scale on Si(100) surfaces with Scanning Tunnelling Microscopy

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 493-496

  Abadal, G ^a   Perez Murano F ^a   Barniol, N ^a   Aymerich, X ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Electrochemical; Scanning Tunnelling Microscopy; Silicon etching

Indexed keywords

ANODIC POLARIZATION; DISSOLUTION; ELECTROCHEMISTRY; ETCHING; HYDROGEN INORGANIC COMPOUNDS; OXIDATION; SCANNING TUNNELING MICROSCOPY; SOLUTIONS; SURFACES;

CATHODIC POLARIZATION; ELECTROCHEMICAL MODIFICATION; HYDROGEN FLUORIDE;

SEMICONDUCTING SILICON;

EID: 0032045450     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00572-5     Document Type: Article

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