A method for the diffractive microrelief formation using the layered photoresist growth

Optics and Lasers in Engineering

Volumn 29, Issue 4-5, 1998, Pages 281-288

  Volkov, A V ^a   Kazanskiy, N L ^a   Moiseyev, O Ju ^a   Soifer, V A ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; MASKS; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE;

DIFFRACTIVE MICRORELIEF; PHOTOMASKS;

OPTICAL DEVICES;

EID: 0032045118     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(97)00116-4     Document Type: Article

References (10)

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2. Morkry, P., Unique applications of computer-generated diffractive optical elements. Proc. SPIE. 1052 (1989) pp. 163-70.
3. Leger, J. R., Moharam, M. G. & Gaylord T. K., Diffractive optics: an introduction to the feature issue. Appl. Opt. 34(14) (1995) pp. 2399-400.
4. Popov, V. V., Materials and methods for the fabrication of planar focusing components. Comput. Opt. 1 (1987) pp. 160-3 (in Russian).
5. Aristov, V. V., Babin, S. V., Yerko, A. I., Capabilities of microelectronic technologies for fabricating computer optics elements. Comput. Opt 4 (1989) pp. 61-65 (in Russian).
6. Golub, M. A., Rybakov, O. E., Usplenjev, G. V., Volkov, A. V. & Volotovsky, S. G, The technology of fabricating focusators of infrared laser radiation. Opt. Laser Technol., 27(4) (1995) pp. 215-8.
7. Shiono, T., Setsune, K., Yamazaki, O. & Wasa, K., Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography. Appl. Opt. 26 (1987) pp. 587-91.
8. Bobrov, S. T., Greysukh, G. I. & Turkevich, Yu. G., Optics of Diffractive Elements and Systems, Machinostroyenie Publishers, Leningrad, 1986, 224 pages (in Russian).
9. Chernyayev, V. N., Physical & Chemical Processes in the Technology of Radioelectronic Sets, Higher School Publishers, Moscow, 1987, 376 pages (in Russian).
10. Valiyev, K. A., Physics of Submicron Lithography, Nauka Publishers, Moscow, 1990, 528 pp. (in Russian).