An expert system for a semiconductor manufacturing environment

Production Planning and Control

Volumn 9, Issue 3, 1998, Pages 303-310

  Szarka, Frank ^a   Moras, Rafael ^b  

^a VLSI Technology Inc   (United States)

^b ST MARY'S UNIVERSITY   (United States)

Author keywords

Expert systems; High tech manufacturing; Statistical process control

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; DECISION SUPPORT SYSTEMS; EXPERT SYSTEMS; INTEGRATED CIRCUIT MANUFACTURE; STATISTICAL PROCESS CONTROL;

FRIENDLY EXPERT SYSTEMS (FES); HIGHTECH MANUFACTURING;

PRODUCTION CONTROL;

EID: 0032043458     PISSN: 09537287     EISSN: 13665871     Source Type: Journal    
DOI: 10.1080/095372898234280     Document Type: Article

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