Photo-assisted metallisation: Line resolution studies

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 80-84

  Lafferty, E J ^a   Macauley, D J ^a   Mongey, K F ^a   Kelly, P V ^a   Crean, G M ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Line resolution; Metallisation

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL ACTIVATION; COPPER PLATING; ELECTROLESS PLATING; EXCIMER LASERS; MORPHOLOGY; NUCLEATION; PHOTOCHEMICAL REACTIONS; SUBSTRATES; SURFACE STRUCTURE;

HIGHLY ORIENTED PYROLYTIC GRAPHITE (HOPG); LINEWIDTH RESOLUTION; SURFACE TOPOGRAPHY;

METALLIZING;

EID: 0032028761     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00592-6     Document Type: Article

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