Electric force microscopy as a probe of active and passive elements of integrated circuits

Applied Surface Science

Volumn 125, Issue 3-4, 1998, Pages 332-338

  Karpov, Ilya ^a   Belcher, Richard W ^b   Linn, Jack H ^b  

^a University of Minnesota   (United States)

^b INTERSIL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROSTATICS; METALLIZING; SURFACE PROPERTIES;

ELECTRIC FORCE MICROSCOPY; METAL INTERCONNECTS; SURFACE TOPOGRAPHY;

INTEGRATED CIRCUITS;

EID: 0032028096     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00456-X     Document Type: Article

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