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Volumn 3, Issue 1, 1998, Pages 3-8
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A mechanical model for energy transfer in linear ultrasonic micromotors using lamb and rayleigh waves
d
UNIV LILLE
(France)
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Author keywords
Microconveyors, micromotors, ultrasonics
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Indexed keywords
ACOUSTIC WAVE SCATTERING;
ENERGY TRANSFER;
MATHEMATICAL MODELS;
MOTION CONTROL;
PIEZOELECTRICITY;
RAYLEIGH SCATTERING;
TRANSDUCERS;
ULTRASONIC DEVICES;
INTERDIGITAL TRANSDUCERS;
LAMB WAVES;
LINEAR ULTRASONIC MICROMOTORS;
MICROCONVEYORS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0032026988
PISSN: 10834435
EISSN: None
Source Type: Journal
DOI: 10.1109/3516.662862 Document Type: Article |
Times cited : (7)
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References (9)
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