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Volumn 100-101, Issue 1-3, 1998, Pages 72-75
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Structure related optical and mechanical properties of oxygen doped Al films
a a b c d e f
f
Surfcoat Oy
(Finland)
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Author keywords
Aluminium; Hardness; Impurity; Nanocrystal; Structure; Thin film
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Indexed keywords
ALUMINUM;
AMORPHOUS MATERIALS;
COMPOSITION EFFECTS;
CRYSTAL IMPURITIES;
CRYSTAL STRUCTURE;
DOPING (ADDITIVES);
HARDNESS;
LIGHT POLARIZATION;
NANOSTRUCTURED MATERIALS;
OXYGEN;
REFLECTOMETERS;
THIN FILMS;
HALL PETCH RELATION;
METALLIC FILMS;
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EID: 0032026024
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00590-2 Document Type: Article |
Times cited : (11)
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References (11)
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