Etch rates of crystallographic planes in Z-cut quartz - Experiments and simulation

Journal of Micromechanics and Microengineering

Volumn 8, Issue 1, 1998, Pages 1-6

  Rangsten, Pelle ^a   Hedlund, Christer ^a   Katardjiev, Ilia V ^a   Bäcklund, Ylva ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; CRYSTALLINE MATERIALS; CRYSTALLOGRAPHY; ETCHING; SCANNING ELECTRON MICROSCOPY;

MONOCRYSTALLINE QUARTZ; TWO STEP DOUBLE SIDED ETCHING PROCESS;

QUARTZ;

EID: 0032025653     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/1/001     Document Type: Article

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