Patterning of tunable planar ferroelectric capacitors based on the YBCO/BSTO film structure

Superconductor Science and Technology

Volumn 11, Issue 3, 1998, Pages 284-287

  Karmanenko, S F ^a   Dedyk, A I ^a   Barchenko, V T ^a   Chakalov, R A ^b   Lunev, A V ^c   Semenov, A A ^a   Ter Martirosyan, L T ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

^b INSTITUTE OF ELECTRONICS   (Bulgaria)

^c IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CERAMIC CAPACITORS; CRYSTAL STRUCTURE; ETCHING; FERROELECTRIC DEVICES; FILM GROWTH; HYSTERESIS; ION BEAMS; MAGNETRON SPUTTERING; MICROWAVE DEVICES; THERMAL EFFECTS;

FERROELECTRIC CAPACITORS; ION BEAM ETCHING; VOLTAGE CAPACITANCE CHARACTERISTICS;

SUPERCONDUCTING FILMS;

EID: 0032025194     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/11/3/006     Document Type: Article

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