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Volumn 34, Issue 3-6, 1998, Pages 387-391

Role of surface features in CVD diamond nucleation on surface-pretreated substrates

Author keywords

CVD diamond; Diamond residue; Si substrate diamond nucleation; Surface features; Surface pretreatments

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NUCLEATION; SILICON WAFERS; SUBSTRATES; SURFACE STRUCTURE; SURFACE TREATMENT; ULTRASONIC APPLICATIONS;

EID: 0032023692     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(97)00208-5     Document Type: Article
Times cited : (4)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.