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Volumn 34, Issue 3-6, 1998, Pages 387-391
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Role of surface features in CVD diamond nucleation on surface-pretreated substrates
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Author keywords
CVD diamond; Diamond residue; Si substrate diamond nucleation; Surface features; Surface pretreatments
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
NUCLEATION;
SILICON WAFERS;
SUBSTRATES;
SURFACE STRUCTURE;
SURFACE TREATMENT;
ULTRASONIC APPLICATIONS;
ULTRASONIFICATION;
DIAMOND FILMS;
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EID: 0032023692
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(97)00208-5 Document Type: Article |
Times cited : (4)
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References (17)
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