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Volumn 39, Issue 1, 1998, Pages 85-86
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Toward chemically amplified photolithography of conjugated polymers: Acid-sensitive polythiophenes
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Author keywords
[No Author keywords available]
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Indexed keywords
AROMATIC POLYMERS;
CONFORMATIONS;
MOLECULAR STRUCTURE;
ORGANIC ACIDS;
PHOTOLITHOGRAPHY;
PHOTOLYSIS;
PHOTOSENSITIVITY;
PLASTIC FILMS;
SEMICONDUCTING FILMS;
SOLUBILITY;
SULFUR COMPOUNDS;
THERMAL EFFECTS;
CAMPHORSULFONIC ACID;
DEPROTECTION;
LASER PHOTOLITHOGRAPHY;
POLYTHIOPHENES;
TRIFLUOROMETHANE SULFONIC ACID;
SEMICONDUCTING POLYMERS;
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EID: 0032022867
PISSN: 00323934
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (3)
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References (10)
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