A contamination-free microstructure in a humid environment by means of a combination of hydrophilic and hydrophobic surfaces

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 94-101

  Abe, Takeshi ^{a,b,c,d,e,f,g}  

^a TOKYO GAS CO LTD   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^d CARNEGIE MELLON UNIVERSITY   (United States)

^e Frontier Technol Res Inst T   (Japan)

^f Institute of Electrical Engineers of   (Japan)

^g IEEE   (Japan)

Author keywords

Hydrophilic surface; Hydrophobic surface; Surface contamination; Surface tension

Indexed keywords

ATMOSPHERIC HUMIDITY; CONDENSATION; DUST CONTROL; OPTICAL DEVICES; SENSORS; SURFACE TENSION;

HYDROPHILIC SURFACE; HYDROPHOBIC SURFACE; MICROSENSORS; SURFACE CONTAMINATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032022641     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661390     Document Type: Article

References (8)

1. S. K. Ghandhi, VLSI Fabrication Principles. New York: Wiley, 1983, p. 586.
2. G. S. P. Castle, I. I. Inculet, J. Komjathy, D. M. Kunick, and P. K. Neihsl, "The effect of relative humidity in dirt control," in Proc. Finishing '93, Cincinnati, OH, Oct. 1993, pp. FC93-397-FC93-397-9.
3. R. Eiden, J. Burkhardt, and O. Burkhard, "Atmospheric aerosol particles and their role in the formation of dew on the surface of plant leaves," J. Aerosol Sci., vol. 25, no. 2, pp. 367-376, 1994.
4. R. G. Cox, "The spreading of a liquid on a rough solid surface," J. Fluid. Mech., vol. 131, pp. 1-26, 1983.
5. N. W. F. Kossen and P. M. Heerjes, Chem. Eng. Sci., vol. 20, p. 593, 1965.
6. A. W. Adamson, Physical Chemistry of Surfaces, 4th ed. New York: Wiley, 1982.
7. T. Abe, W. C. Messner, and M. L. Reed, "Effects of elevated temperature treatments in microstructure release procedures," IEEE J. Micmelectromech. Syst., vol. 4, no. 2, pp. 66-75, 1995.
8. CRC Handbook of Chemistry and Physics, 72nd ed. Boca Raton, FL: CRC, 1991, pp. 6-9.