Characterization of titanium hydride film after long-term air interaction: SEM, ARXPS and AES depth profile studies

Surface and Interface Analysis

Volumn 26, Issue 3, 1998, Pages 213-219

  Lisowski, W ^a   Van Den Berg, A H J ^b   Smithers, M ^b  

^a POLISH ACADEMY OF SCIENCES   (Poland)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

AES depth profiles; ARXPS; SEM; Titanium; Titanium hydride

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON MONOXIDE; CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; HYDROCARBONS; NITROGEN; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TITANIUM; TITANIUM CARBIDE; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE RESOLVED X RAY PHOTOELECTRON SPECTROSCOPY (ARXPS); TITANIUM HYDRIDE;

METALLIC FILMS;

EID: 0032021804     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199803)26:3<213::aid-sia362>3.0.co;2-g     Document Type: Article

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