Simultaneous determination of the thickness and optical constants of weakly absorbing thin films

Measurement Science and Technology

Volumn 9, Issue 3, 1998, Pages 485-487

  Gauthier Manuel, B ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION (WAVES); LIGHT TRANSMISSION; MICA; REFRACTIVE INDEX;

DISPERSION COEFFICIENT; OPTICAL CONSTANT;

THIN FILMS;

EID: 0032021797     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/3/024     Document Type: Article

References (11)

1. Hall J F and Fergusson WFC 1955 Optical properties of cadmium sulfide and zinc sulfide from 0.6 micron to 14 microns J. Opt. Soc. Am. 45 714-18
2. Lyashenko S P and Miloslavskii V K 1964 A simple method for the determination of the thickness and optical constants of semiconducting and dielectric layers Opt. Spectrosc. 16 80-1
3. Manifacier J C, Gasiot J and Fillard J P 1979 A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film J. Phys. E: Sci. Instrum. 9 1002-4
4. Wang Y and Miyagi M 1997 Simultaneous measurement of optical constants of dispersive material at visible and infrared wavelengths Appl. Opt. 36 877-84
5. Holtslag A H M and Scholte PMLO 1989 Optical measurement of the refractive index, layer thickness, and volume changes of thin films Appl. Opt. 28 5095-104
6. Farrel B, Bailey A I and Chapman D 1995 Experimental phase changes at the mica-silver interface illustrate the experimental accuracy of the central film thickness in a symmetrical three-layer interferometer Appl. Opt. 34 2914-20
7. Born M and Wolf E 1980 Principles of Optics 4th edn (New York: Pergamon) p 630
8. Levenberg K 1994 A method for the solution of certain non-linear problems in least squares Q. Appl. Math. 2 164-8
9. Marquardt D W 1963 An algorithm for least-squares estimation of non linear parameters J. Soc. Indust. Appl. Math. 11 431-41
10. Tolansky S 1948 Multiple Beam Interferometry of Surfaces and Films (Oxford: Clarendon) p 115
11. Bailey A I and Kay S M 1965 Measurement of refractive index and dispersion of mica, employing multiple beam interference techniques Br. J. Appl. Phys. 16 39-44