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Volumn 46 B46, Issue 3, 1998, Pages 202-207

Photochemical sensors based on amorphous silicon thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; GAS ABSORPTION; HYDROGEN; MIS DEVICES; PHOTOCHEMICAL REACTIONS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DIODES; SEMICONDUCTOR INSULATOR BOUNDARIES; THERMOOXIDATION; THIN FILMS;

EID: 0032021479     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-4005(98)00112-9     Document Type: Article
Times cited : (5)

References (7)
  • 2
    • 49149135059 scopus 로고
    • Hydrogen sensitive MOS-structure. Part 1: Principle and applications
    • I Lundström Hydrogen sensitive MOS-structure. Part 1: Principle and applications Sens. Actuators 1 1981 403 426
    • (1981) Sens. Actuators , vol.1 , pp. 403-426
    • Lundström, I1
  • 3
    • 0020846456 scopus 로고
    • Transport properties of a Pd/insulator/a-Si:H Schottky diode for hydrogen detection
    • A D’Amico G Fortunato G Petrocco Transport properties of a Pd/insulator/a-Si:H Schottky diode for hydrogen detection Sens. Actuators 4 1983 349 356
    • (1983) Sens. Actuators , vol.4 , pp. 349-356
    • D’Amico, A1    Fortunato, G2    Petrocco, G3
  • 4
    • 85119545689 scopus 로고    scopus 로고
    • E. Fortunato, A. Malik, A. Sêco, I. Ferreira, R. Martins, Amorphous silicon sensors: from photo to chemical detection, J. Non-Cryst. Solids (1998) in press.
  • 5
    • 85119547756 scopus 로고
    • S.M Sze Physics of Semiconductor Devices 1981 Wiley New York 284
    • (1981) , pp. 284
    • Sze, S.M1
  • 6
    • 0003957801 scopus 로고
    • Semiconductors and Semimetals
    • A D’Amico G Fortunato Semiconductors and Semimetals J.I Pankov Part D 21 1984 Academic Press New York 209 237
    • (1984) , pp. 209-237
    • D’Amico, A1    Fortunato, G2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.