Lattice site location and annealing behavior of W implanted TiO2

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 442-446

  Da Silva, R C ^a   Alves, E ^a   Redondo, L M ^a   Fromknecht, R ^b   Meyer, O ^b  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Damage recovery; Ion implantation; Lattice location; Rutile (TiO2)

Indexed keywords

ANISOTROPY; ANNEALING; CRYSTAL LATTICES; EPITAXIAL GROWTH; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; TUNGSTEN;

DAMAGE RECOVERY; LATTICE SITE LOCATION;

TITANIUM DIOXIDE;

EID: 0032020996     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00726-X     Document Type: Article

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