Generation and relief of mechanical stresses in ion irradiated SiC and SiO2

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 505-510

  Harbsmeier, Felix ^a   Conrad, Jens ^a   Bolse, Wolfgang ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Ion irradiation; Mechanical stresses; SiC; SiO2; Volume swelling

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; ION BEAMS; ION BOMBARDMENT; NUCLEATION; QUARTZ; RADIATION DAMAGE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; STRESS ANALYSIS; STRESS RELAXATION; SWELLING;

COMPRESSIVE STRESSES; MECHANICAL SURFACE PROFILING (MSP);

CERAMIC MATERIALS;

EID: 0032020294     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00688-5     Document Type: Article

References (21)

1. W. Boise, S.D. Peteves, Nucl. Instr. and Meth. B 68 (1992) 331.
2. W. Bolse, S.D. Peteves, F.W. Saris, Euro-Ceramics 2 (1993) 1091.
3. W. Bolse, S.D. Peteves, F.W. Saris, Appl. Phys. A 58 (1994) 493.
4. W. Bolse, J. Conrad, F. Harbsmeier, M. Borowski, T. Rödle, Mater. Sci. Forum 248/249 (1997) 319.
5. W. Bolse, M. Borowski, J. Conrad, F. Harbsmeier, AIP CP 392 (1997) 927.
6. W. Bolse, J. Conrad, T. Rödle, T. Weber, Surf. Coat. Technol. 74/75 (1995) 927.
7. J. Conrad, T. Rödle, T. Weber, W. Bolse, Nucl. Instr. and Meth. B 118 (1996) 488.
8. J. Conrad, W. Bolse, M. Borowski, T. Rödle, J.C. Ewert, Phys. Rev. B, submitted.
9. F. Harbsmeier, W. Bolse, Mater. Sci. Forum 248/249 (1997) 279.
10. F. Harbsmeier, W. Bolse, J. Appl. Phys., submitted.
11. C.A. Volkerts, A. Polman, Mater. Res. Soc. Symp. Proc. 235 (1992) 3.
12. E. Snoeks, A. Polman, C.A. Volkert, Appl. Phys. Lett. 65 (1994) 2487.
13. G. Götz, in: P. Mazzoldi, G.W. Arnolds (Eds.), Ion Beam Modification of Insulators, Elsevier, Amsterdam, The Netherlands, 1987.
14. E.P. EerNisse, J. Appl. Phys. 45 (1974) 167.
15. M. Uhrmacher, K. Pampus, F.J. Bergmeister, D. Purschke, K.P. Lieb, Nucl. Instr. and Meth. B 9 (1985) 234.
16. W.K. Chu, J.W. Mayer, M.-A. Nicolet, in: Backscattering Spectrometry, Academic Press, Orlando, USA, 1978.
17. J. Conrad, Amorphisierung von α-SiC durch Ionenbestrahlung, Doctoral Thesis, Cuvillier Verlag, Göttingen, Germany, 1976.
18. R.C. Weast, M.J. Astle (Eds.), CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, USA, 1982.
19. G.G. Stoney, Proc. Roy. Soc. A 82 (1909) 172.
20. H. Frey, G. Kienel, Dünnschichttechnologie, VDI Verlag, Düsseldorf, Germany, 1987.
21. A.G. Smagin, B.G. Mil'shtein, Sov. Phys. Crystallogr. 19 (1975) 514.