Raman spectrometer for in situ diagnostics of materials in gas discharge plasma

Pribory i Tekhnika Eksperimenta

Volumn 41, Issue 2, 1998, Pages 144-148

  Pavlovskij, I Yu ^a   Obraztsov, A N ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; ELECTRIC DISCHARGES; FILM GROWTH; IN SITU PROCESSING; INFRARED SPECTROMETERS; PLASMAS;

IN SITU DIAGNOSTICS;

RAMAN SPECTROSCOPY;

EID: 0032019907     PISSN: 00328162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)