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Volumn 136-138, Issue , 1998, Pages 478-482

The dose effect of silicon implantation on hydrogen trapping in aluminum

Author keywords

Aluminum; Hydrogen; Implantation; Impurity; Silicon; Trapping

Indexed keywords

ALUMINUM; HYDROGEN; IMPURITIES; SILICON; SUPERSATURATION;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); HYDROGEN TRAPPING;

ION IMPLANTATION;

EID: 0032019716 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00722-2 Document Type: Article

Times cited : (3)

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