Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 649-653

  Elliman, R G ^a   Timmers, H ^b   Palmer, G R ^a   Ophel, T R ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Depth resolution; Elastic recoil detection analysis; Ion beam analysis

Indexed keywords

ALUMINUM; COBALT; GOLD; ION BOMBARDMENT; IONIZATION CHAMBERS; METALLIC FILMS; THIN FILMS;

HEAVY ION ELASTIC RECOIL DETECTION ANALYSIS (HIERDA); ION BEAM ANALYSIS (IBA);

ION BEAMS;

EID: 0032017649     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00879-3     Document Type: Article

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