High depth resolution analysis of Cu/Si(111) "5 × 5" structure with medium energy ion scattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1086-1091

  Yamashita, K ^a   Yasue, T ^a   Koshikawa, T ^a   Ikeda, A ^b   Kido, Y ^b  

^a OSAKA ELECTRO COMMUNICATION UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Cu on Si(111); Medium energy ion scattering; Monte Carlo simulation; Surface structure analysis

Indexed keywords

COMPUTER SIMULATION; COPPER; ELECTRON TRANSITIONS; HETEROJUNCTIONS; IONS; MONTE CARLO METHODS; SCATTERING; SEMICONDUCTING SILICON; SURFACE STRUCTURE;

MEDIUM ENERGY ION SCATTERING; PLASMON EXCITATION;

NUCLEAR INSTRUMENTATION;

EID: 0032017530     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00897-5     Document Type: Article

References (28)

1. J. Vrijmoeth, P.M. Zagwijn, E. Vlieg, J.W.M. Frenken, Surf. Sci. 290 (1993) 255.
2. J. Vrijmoeth, S. Zaima, E. Vlieg, J.W.M. Frenken, Phys. Rev. B 45 (1992) 6700.
3. K. Kimura, K. Ohshima, M. Mannami, Phys. Rev. B 52 (1995) 5737.
4. T. Koshikawa, T. Yasue, H. Tanaka, I. Sumita, Y. Kido, Nucl. Instr. and Meth. B 99 (1995) 495.
5. K. Sumitomo, T. Nishioka, A. Ikeda, Y. Kido, Phys. Rev. B 56 (1997) 9011.
6. A. Ikeda, K. Sumitomo, T. Nishioka, T. Yasue, T. Koshikawa, Y. Kido, Surf. Sci. 385 (1997) 200.
7. T. Koshikwa, T. Yasue, H. Tanaka, I. Sumita, Y. Kido, Surf. Sci. 331/333 (1995) 506.
8. K. Takayanagi, Y. Tanishiro, T. Ishitsuka, K. Akiyama, Appl. Surf. Sci. 41/42 (1989) 337.
9. D.D. Chambliss, T.N. Rhodin, Phys. Rev. B 42 (1990) 1674.
10. S.A. Chambers, S.B. Anderson, J.H. Weaver, Phys. Rev. B 32 (1985) 581.
11. J. Zegenhagen, E. Fontes, F. Grey, J.R. Patel, Phys. Rev. B 46 (1992) 1860.
12. K. Mortensen, Phys. Rev. Lett. 66 (1991) 461.
13. T. Ichinokawa et al., Proc. of Symp. on Advanced Surface Analytical Technology, in: R. Shimizu (Ed.), Jpn. Soc. Prom. Sci., in press.
14. T. Koshikawa, R. Kikuchi, K. Takagi, T. Uchiyama, Y. Mihara, Y. Agawa, S. Matsuura, E. Inuzuka, T. Suzuki, Nucl. Instr. and Meth. B 33 (1988) 623.
15. J.F. Ziegler, J.P. Biersack, W. Littmark, The Stopping and Range of Ions in Solids, Pergamon, New York, 1985.
16. J.P. Biersack, L.G. Haggmark, Nucl. Instr. and. Meth. 174 (1980) 257.
17. J.F. Ziegler, Helium Stopping Powers and Ranges in All Elemental Matter, Pergamon, New York, 1977.
18. O.S. Oen, M.T. Robinson, Nucl. Instr. and Meth. 132 (1976) 647.
19. R. Kawai, N. Itoh, Y.H. Ohtsuki, Surf. Sci. 114 (1982) 137.
20. W.K. Chu, Phys. Rev. A 13 (1976) 2057.
21. I.K. Robinson, J. Vac. Sci. Technol. A 6 (1988) 1966.
22. A. Ichimiya, Surf. Sci. 192 (1987) L893.
23. S.Y. Tong, H. Huang, C.M. Wei, W.E. Packard, F.K. Men, G. Glander, M.B. Webb, J. Vac. Sci. Technol. A 6 (1988) 615.
24. G.-X. Qian, D.J. Chadi, Phys. Rev. B 35 (1987) 1288.
25. E. Zannazzi, F. Jona, Surf. Sci. 62 (1977) 61.
26. K. Takayanagi, Y. Tanishiro, M. Takahashi, S. Takahashi, J. Vac. Sci. Technol. A 3 (1985) 1502.
27. E. Daugy, P. Mathiez, F. Salvan, J.M. Layet, Surf. Sci. 154 (1985) 267.
28. H. Kemmann, F. Muller, H. Neddermsyer, Surf. Sci. 192 (1987) 11.