|
Volumn 41, Issue 3, 1998, Pages 75-82
|
Can overall factory effectiveness prolong Moore's Law?
|
Author keywords
[No Author keywords available]
|
Indexed keywords
MICROPROCESSOR CHIPS;
PRODUCTIVITY;
OVERALL EQUIPMENT EFFECTIVENESS (OEE);
OVERALL FACTORY EFFECTIVENESS (OFE);
SEMICONDUCTOR DEVICE MANUFACTURE;
|
EID: 0032010663
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (42)
|
References (8)
|