Composition profiling of graded dielectric function materials by spectroscopic ellipsometry

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 389-393

  Trolier McKinstry, S ^a   Koh, J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Composition profiling; Dielectrics; Spectroscopic ellipsometry

Indexed keywords

ALUMINUM COMPOUNDS; ELLIPSOMETRY; ETCHING; GLASS; LEAD COMPOUNDS; MATHEMATICAL MODELS; OPTICAL FILMS; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; SILICATES; SURFACE ROUGHNESS; TRANSPARENCY;

ALUMINOSILICATE; LEAD SILICATE; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0032002821     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00852-3     Document Type: Article

References (11)

1. A.R. Heyd, Spectroscopic Ellipsometry and its Application to III-V Semiconductors, Ph.D. Thesis, The Pennsylvania State University, 1993.
2. P.G. Snyder, M.C. Rost, G.H. Bu-Abbud, J.A. Woollam, S.A. Alterovitz, J. Appl. Phys. 60 (1986) 3293.
3. M. Fried, T. Lohner, W.A.M. Aarnink, L.J. Hanekamp, A. Van Silfhout, J. Appl. Phys. 71 (1992) 2835.
4. J. Koh, The Sensitivity Limits of Spectroscopic Ellipsometry for the Characterization of Optical Coatings, M.S. Thesis, The Pennsylvania State University, 1995.
5. D.V. Mazurin, S. Shvaikovskaya, M.V. Streltsina, Handbook of Glass Data, Part A, Elsevier, New York, 1985.
6. N.P. Bansal, R.H. Doremus, Handbook of Glass Properties, Academic Press, Orlando, 1986.
7. I.H. Malitson, J. Opt. Soc. Am. 55 (1965) 1205.
8. A. D'Souza, C.G. Pantano, Phys. Chem. Glasses, in press.
9. P. Chindaudom, K. Vedam, Opt. Lett. 17 (1992) 538.
10. P. Chindaudom, K. Vedam, Appl. Opt. 32 (1993) 6391.
11. P. Chindaudom, K. Vedam, in: K. Vedam (Ed.), Physics of Thin Films, 19: Optical Characterization of Real Surfaces and Films, Academic Press, New York, 1994, p. 191.