Measurements of electron density in helicon-wave excited high-density reactive plasmas by vacuum ultraviolet emission spectroscopy

Plasma Sources Science and Technology

Volumn 7, Issue 1, 1998, Pages 36-40

  Kawai, Y ^a   Sasaki, K ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRONS; PLASMA WAVES; ULTRAVIOLET SPECTROSCOPY;

ELECTRON DENSITY; HELICON WAVE EXCITED PLASMAS; HIGH DENSITY REACTIVE PLASMAS;

PLASMA DENSITY;

EID: 0032002342     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/1/006     Document Type: Article

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