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Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 697-703

In situ characterization of cubic boron nitride film growth in the IR spectral region

(5) Barth, K L a Fukarek, W b Maucher, H P a Plass, M F b Lunk, A a

a UNIVERSITY OF STUTTGART (Germany)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

Cubic boron nitride; In situ diagnostics; Polarized FTIR reflectometry; VIS ellipsometry

Indexed keywords

CUBIC BORON NITRIDE; DAMPING; ELECTRODEPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LATTICE VIBRATIONS; LIGHT REFLECTION; PHONONS; PLASMA APPLICATIONS; SPECTRUM ANALYSIS;

OSCILLATOR STRENGTH; POLARIZED INFRARED REFLECTION SPECTROSCOPY;

FILM GROWTH;

EID: 0032002335 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00980-2 Document Type: Article

Times cited : (10)

References (20)

1
- 0000043758
- M. Kuhr, S. Reinke, W. Kulisch, Diamond Relat. Mater. 4 (1995) 375.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 375
- Kuhr, M.¹ Reinke, S.² Kulisch, W.³

2
- 0001369675
- R. Freudenstein, S. Reinke, W. Kulisch, Diamond Relat. Mater. 6 (1997) 584.
- (1997) Diamond Relat. Mater. , vol.6 , pp. 584
- Freudenstein, R.¹ Reinke, S.² Kulisch, W.³

3
- 0031153227
- K.-L. Barth, W. Sigle, D. Stöckle, J. Umer, A. Lunk, Thin Solid Films 301 (1997) 65.
- (1997) Thin Solid Films , vol.301 , pp. 65
- Barth, K.-L.¹ Sigle, W.² Stöckle, D.³ Umer, J.⁴ Lunk, A.⁵

4
- 0027608960
- D.J. Kester, K.S. Ailey, R.F. Davis, J. Mater. Res. 8 (1993) 1213.
- (1993) J. Mater. Res. , vol.8 , pp. 1213
- Kester, D.J.¹ Ailey, K.S.² Davis, R.F.³

5
- 0029373460
- K.-L. Barth, A. Lunk, Surf. Coat. Technol. 74/75 (1995) 110.
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 110
- Barth, K.-L.¹ Lunk, A.²

6
- 0025662649
- A. Lunk, Vacuum 41 (1990) 1965.
- (1990) Vacuum , vol.41 , pp. 1965
- Lunk, A.¹

7
- 0042260772
- K.-L. Barth, A. Neuffer, J. Ulmer, A. Lunk, Diamond Relat. Mater. 5 (1996) 1270.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1270
- Barth, K.-L.¹ Neuffer, A.² Ulmer, J.³ Lunk, A.⁴

8
- 0026418936
- A. Lunk, Mater. Sci. Eng. A140 (1991) 666.
- (1991) Mater. Sci. Eng. , vol.A140 , pp. 666
- Lunk, A.¹

9
- 0003808259
- North Holland, Amsterdam, New York, Oxford
- R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North Holland, Amsterdam, New York, Oxford, 1977.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

10
- 0030547577
- P.B. Mirkarimi, K.F. McCarty, G.F. Cardinale, D.L. Medlin, O.K. Ottesen, H.A. Johnsen, J. Vac. Sci. Technol. A14 (1996) 251.
- (1996) J. Vac. Sci. Technol. , vol.A14 , pp. 251
- Mirkarimi, P.B.¹ McCarty, K.F.² Cardinale, G.F.³ Medlin, D.L.⁴ Ottesen, O.K.⁵ Johnsen, H.A.⁶

11
- 0347226297
- to be published
- A. Lunk et al., to be published.
- Lunk, A.¹

12
- 0028416882
- J.A. Woollam, W.A. McGahan, B. Johs, Thin Solid Films 241 (1994) 44.
- (1994) Thin Solid Films , vol.241 , pp. 44
- Woollam, J.A.¹ McGahan, W.A.² Johs, B.³

13
- 0038509307
- H. Hofsäss, C. Ronning, U. Griesmaier, M. Gross, S. Reinke, M. Kuhr, J. Zweck, R. Fischer, Nucl. Instrum. Methods B 106 (1995) 153.
- (1995) Nucl. Instrum. Methods B , vol.106 , pp. 153
- Hofsäss, H.¹ Ronning, C.² Griesmaier, U.³ Gross, M.⁴ Reinke, S.⁵ Kuhr, M.⁶ Zweck, J.⁷ Fischer, R.⁸

14
- 0001252916
- G. Sené, D. Bouchier, S. Ilias, M.A. Djouadi, J. Pascallon, V. Stambouli, P. Möller, G. Hug, Diamond Relat. Mater. 5 (1996) 530.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 530
- Sené, G.¹ Bouchier, D.² Ilias, S.³ Djouadi, M.A.⁴ Pascallon, J.⁵ Stambouli, V.⁶ Möller, P.⁷ Hug, G.⁸

15
- 4544350416
- R. Geick, C.H. Perry, Phys. Rev. 146 (1966) 543.
- (1966) Phys. Rev. , vol.146 , pp. 543
- Geick, R.¹ Perry, C.H.²

16
- 36049057047
- P.J. Gielisse, S.S. Mitra, J.N. Plendl, R.D. Griffis, L.C. Mansur, R. Marshall, E.A Pascoe, Phys. Rev. 155 (1967) 1039.
- (1967) Phys. Rev. , vol.155 , pp. 1039
- Gielisse, P.J.¹ Mitra, S.S.² Plendl, J.N.³ Griffis, R.D.⁴ Mansur, L.C.⁵ Marshall, R.⁶ Pascoe, E.A.⁷

17
- 0040211840
- M.F. Plass, W. Fukarek, A Kolitsch, W. Möller, Diamond Relat. Mater. 6 (1997) 594.
- (1997) Diamond Relat. Mater. , vol.6 , pp. 594
- Plass, M.F.¹ Fukarek, W.² Kolitsch, A.³ Möller, W.⁴

18
- 0000621898
- S. Reinke, M. Kuhr, W. Kulisch, Diamond Relat. Mater. 5 (1996) 508.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 508
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³

19
- 0039020499
- R. Ossikovski, B. Drévillon, M. Firon, J. Opt. Soc. Am. A12 (1995) 1779.
- (1995) J. Opt. Soc. Am. , vol.A12 , pp. 1779
- Ossikovski, R.¹ Drévillon, B.² Firon, M.³

20
- 0001209132
- J.A. Moreno, B. Garrido, J. Samitier, J.R. Morante, J. Appl. Phys. 81 (1997) 1933.
- (1997) J. Appl. Phys. , vol.81 , pp. 1933
- Moreno, J.A.¹ Garrido, B.² Samitier, J.³ Morante, J.R.⁴

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