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Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 420-423

Atomic scale characterization of the initial stage of hydrogenated silicon growth

(3) Nakamura, Takuya a Aral, Takeshi a Shirai, Hajime a

a SAITAMA UNIVERSITY (Japan)

Author keywords

AFM; Atomically flat c Si(111) surface; In situ ellipsometry; Si:H

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; ELLIPSOMETRY; FILM GROWTH; GLOW DISCHARGES; HYDROGENATION; MORPHOLOGY; SPECTROPHOTOMETRY; STRAIN;

SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

EID: 0032002135 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00857-2 Document Type: Article

Times cited : (1)

References (18)

1
- 0003277549
- H. Fritzsche (Ed.), World Scientific, Singapore
- R.W. Collins, in: H. Fritzsche (Ed.), Advances in Disordered Semiconductors, vol. 1, World Scientific, Singapore, 1989, p. 1003.
- (1989) Advances in Disordered Semiconductors , vol.1 , pp. 1003
- Collins, R.W.¹

2
- 0005306026
- M. Fang, B. Drevillon, J. Appl. Phys. 70 (1991) 4894.
- (1991) J. Appl. Phys. , vol.70 , pp. 4894
- Fang, M.¹ Drevillon, B.²

3
- 36549104732
- Y. Toyoshima, K. Arai, A. Matsuda, K. Tanaka, Appl. Phys. Lett. 57 (1990) 1028.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1028
- Toyoshima, Y.¹ Arai, K.² Matsuda, A.³ Tanaka, K.⁴

4
- 17344380781
- Y. Miyoshi, Y. Yoshida, S. Miyazaki, M. Hirose, J. Non-Cryst. Solids 198/200 (1996) 1029.
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 1029
- Miyoshi, Y.¹ Yoshida, Y.² Miyazaki, S.³ Hirose, M.⁴

5
- 17344384926
- K. Ikuta, Y. Toyoshima, S. Yamazaki, A. Matsuda, K. Tanaka, J. Non-Cryst. Solids 198/200 (1996) 863.
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 863
- Ikuta, K.¹ Toyoshima, Y.² Yamazaki, S.³ Matsuda, A.⁴ Tanaka, K.⁵

6
- 0028529704
- H. Shirai, B. Drevillon, I. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 5590.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 5590
- Shirai, H.¹ Drevillon, B.² Shimizu, I.³

7
- 0029256037
- H. Shirai, Jpn. J. Appl. Phys. 34 (1995) 450.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 450
- Shirai, H.¹

8
- 36449001216
- M. Niwano, J. Kageyama, K. Kurita, K. Kinashi, I. Takahashi, N. Miyamoto, J. Appl. Phys. 76 (1994) 2157.
- (1994) J. Appl. Phys. , vol.76 , pp. 2157
- Niwano, M.¹ Kageyama, J.² Kurita, K.³ Kinashi, K.⁴ Takahashi, I.⁵ Miyamoto, N.⁶

9
- 21544433109
- G.S. Higashi, Y.J. Chabal, G.W. Trucks, K. Raghavachari, Appl. Phys. Lett. 56 (1990) 656.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 656
- Higashi, G.S.¹ Chabal, Y.J.² Trucks, G.W.³ Raghavachari, K.⁴

10
- 0010257893
- S. Vallon, E. Compain, B. Drevillon, Rev. Sci. Instrum. 66 (1995) 3269.
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 3269
- Vallon, S.¹ Compain, E.² Drevillon, B.³

11
- 36549094870
- A.M. Antoine, B. Drevillon, J. Appl. Phys. 63 (1988) 360.
- (1988) J. Appl. Phys. , vol.63 , pp. 360
- Antoine, A.M.¹ Drevillon, B.²

12
- 0346812795
- R.W. Collins, J.M. Cavese, MRS Symp. Proc. 118 (1989) 19.
- (1989) MRS Symp. Proc. , vol.118 , pp. 19
- Collins, R.W.¹ Cavese, J.M.²

13
- 0009010291
- K. Mui, F.W. Smith, Phys. Rev. B38 (1985) 10623.
- (1985) Phys. Rev. , vol.B38 , pp. 10623
- Mui, K.¹ Smith, F.W.²

14
- 36449007657
- S. Boultadakis, S. Logothetidis, S. Ves, J. Appl. Phys. 73 (1993) 914.
- (1993) J. Appl. Phys. , vol.73 , pp. 914
- Boultadakis, S.¹ Logothetidis, S.² Ves, S.³

15
- 0005319999
- to be published
- T. Nakamura, T. Arai, H. Shirai, Appl. Phys. Lett, (to be published).
- Appl. Phys. Lett
- Nakamura, T.¹ Arai, T.² Shirai, H.³

16
- 0346597465
- to be published
- H. Shirai, T. Arai, T. Nakamura, Jpn. J. Appl. Phys. (to be published).
- Jpn. J. Appl. Phys.
- Shirai, H.¹ Arai, T.² Nakamura, T.³

17
- 0011498169
- D.E. Aspnes, A.A. Stunna, Phys. Rev. B27 (1983) 7466.
- (1983) Phys. Rev. , vol.B27 , pp. 7466
- Aspnes, D.E.¹ Stunna, A.A.²

18
- 0027187813
- G.E. Jellison, Jr., M. Keefer, L. Thornquist, Mater. Res. Soc. Symp. Proc. 283 (1993) 561.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.283 , pp. 561
- Jellison G.E., Jr.¹ Keefer, M.² Thornquist, L.³

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