A novel treatment technique for DMSO wastewater

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 1, 1998, Pages 3-8

  Koito, Tatsuya ^a   Tekawa, Masafumi ^a   Toyoda, Arata ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGENTS; ENVIRONMENTAL PROTECTION; HYDROGEN PEROXIDE; ORGANIC SOLVENTS; OXIDATION; ULTRAVIOLET RADIATION; WASTEWATER TREATMENT;

DIMETHYL SULFOXIDE; METHANESULFONIC ACID; OXIDIZING AGENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032000584     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.661277     Document Type: Article

References (17)

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