Energy quenching effects on dry-etching durability of copolymers and polymer blends of vinylnaphthalene or α-methyl styrene with methyl methacrylate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 2, 1998, Pages 715-719

  Kushida, Masahito ^a   Yoshida, Yoshinori ^a   Harada, Kieko ^a   Saito, Kyoichi ^a   Sugita, Kazuyuki ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

Dry etching durability; Energy quenching; Etching rate; Molecular weight; Normalized etching rate; O2 reactive etching; wt additivity

Indexed keywords

COPOLYMERS; MOLECULAR WEIGHT; POLYMER BLENDS; POLYMETHYL METHACRYLATES; POLYSTYRENES; REACTION KINETICS; REACTIVE ION ETCHING; VINYL RESINS;

POLYMETHYL STYRENE; POLYVINYL NAPHTHALENE;

DRY ETCHING;

EID: 0031997353     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.715     Document Type: Article

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