|
Volumn 5, Issue 3-4, 1998, Pages 227-231
|
A method for local application of thin organic adhesive films on micropatterned structures
a a |
Author keywords
Adhesion; Organic films; Polymer films; Silicon
|
Indexed keywords
ADHESION;
ADHESIVE JOINTS;
ADHESIVES;
CRYSTAL MICROSTRUCTURE;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE STRUCTURES;
MICRODISPENSER;
MICROMECHANICAL STRUCTURE;
THIN FILM TECHNOLOGY;
THIN ORGANIC ADHESIVE FILMS;
PLASTIC FILMS;
|
EID: 0031997274
PISSN: 09284931
EISSN: None
Source Type: Journal
DOI: 10.1016/S0928-4931(97)00048-9 Document Type: Article |
Times cited : (12)
|
References (6)
|