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Volumn 65, Issue 1, 1998, Pages 19-22

Dynamic measurement of thin liquid film parameters using high-speed ellipsometry

Author keywords

Dynamic measurements; High speed ellipsometry; Thin liquid films

Indexed keywords

FIBER OPTICS; LIGHT MODULATION; LIGHT POLARIZATION; LIGHT REFLECTION; REFRACTIVE INDEX; THIN FILMS;

EID: 0031996829     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01642-7     Document Type: Article
Times cited : (3)

References (11)
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    • Klein, R.1    Kuntzler, L.2    El Ghemmaz, A.3
  • 4
    • 0001583920 scopus 로고
    • Automatic rotating element ellipsometers: Calibration, operation and real time applications
    • R.W. Collins, Automatic rotating element ellipsometers: calibration, operation and real time applications. Rev. Sci. Instrum., 61 (1990) 2029-2069.
    • (1990) Rev. Sci. Instrum. , vol.61 , pp. 2029-2069
    • Collins, R.W.1
  • 5
    • 84975659848 scopus 로고
    • Two channel polarization modulation ellipsometer
    • G.E. Jellison and F.A. Modine, Two channel polarization modulation ellipsometer, Appl. Opt., 29 (1990) 959-974.
    • (1990) Appl. Opt. , vol.29 , pp. 959-974
    • Jellison, G.E.1    Modine, F.A.2
  • 6
    • 0021409310 scopus 로고
    • All-fiber ellipsometry
    • T. Yoshino and K. Kurosawa, All-fiber ellipsometry, Appl. Opt., 23 (1984) 1100-1102.
    • (1984) Appl. Opt. , vol.23 , pp. 1100-1102
    • Yoshino, T.1    Kurosawa, K.2
  • 7
    • 0028526960 scopus 로고
    • A Hi-Bi fiber polarization modulation scheme for ellipsometry: System analysis and performance
    • R. Chitaree, K. Weir, A.W. Palmer and K.T.V. Grattan, A Hi-Bi fiber polarization modulation scheme for ellipsometry: system analysis and performance, Meas. Sci. Technol., 5 (1994) 1226-1232.
    • (1994) Meas. Sci. Technol. , vol.5 , pp. 1226-1232
    • Chitaree, R.1    Weir, K.2    Palmer, A.W.3    Grattan, K.T.V.4
  • 8
    • 0026796398 scopus 로고
    • A fast operating laser device for measuring the thickness of transparent solid and liquid films
    • A.B. Fedortsov, D.G. Letenko, Yu.V. Churkin, I.A. Torchinsky and A.S. Ivanov, A fast operating laser device for measuring the thickness of transparent solid and liquid films, Rev. Sci. Instrum., 63 (1992) 3579-3582.
    • (1992) Rev. Sci. Instrum. , vol.63 , pp. 3579-3582
    • Fedortsov, A.B.1    Letenko, D.G.2    Churkin, Yu.V.3    Torchinsky, I.A.4    Ivanov, A.S.5
  • 11
    • 84975622245 scopus 로고
    • Simultaneous measurement of refractive index and thickness of thin film by polarized reflectance
    • T. Kihara and K. Yokomori, Simultaneous measurement of refractive index and thickness of thin film by polarized reflectance, Appl. Opt., 29 (1990) 5069-5073.
    • (1990) Appl. Opt. , vol.29 , pp. 5069-5073
    • Kihara, T.1    Yokomori, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.