Diamond synthesis with a superconducting magnet assisted hollow cathode plasma CVD apparatus

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 139-142

  Hirata, Atsushi ^a   Yoshikawa, Masanori ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chemical vapor deposition; Diamond; Magnetic field; Plasma; Superconducting magnet

Indexed keywords

DIAMONDS; MAGNETIC FIELD EFFECTS; PLASMAS; SUPERCONDUCTING MAGNETS;

HOLLOW CATHODE;

CHEMICAL VAPOR DEPOSITION;

EID: 0031996364     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00217-3     Document Type: Article

References (5)

1. H. Masumoto, T. Goto, T. Hirai, Appl. Phys. Lett. 55 (1989) 498.
2. J. Wei, H. Kawarada, J. Suzuki, A. Hiraki, Jpn. J. Appl. Phys. 29 (1990) L1486.
3. R.L. Woodin, L.K. Bigelow, G.L. Cann, in: Y. Tzeng, M. Yoshikawa, M. Murakawa, A. Feldman (Eds.), Applications of Diamond Films and Related Materials, Elsevier, New York, 1991, p. 309.
4. J.J. Chang, T.D. Mantei, R. Vuppuladhadium, H.E. Jackson, Appl. Phys. Lett. 59 (1991) 1170.
5. T. Abe, M. Suemitsu, N. Miyamoto, N. Sato, Appl. Phys. Lett. 59 (1991) 911.