Gas phase study with CF4 and CCl2F2 addition in microwave CVD diamond growth

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 272-275

  Ferreira, N G ^a   Corat, E J ^a,b   Trava Airoldi, V J ^a,b   Leite, N F ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b UNIVERSIDADE SÃO FRANCISCO   (Brazil)

Author keywords

CVD diamond; Gas phase; Microwave

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GASES; GROWTH (MATERIALS); HALOGEN COMPOUNDS; MICROWAVES;

HALOGENATED PRECURSOR;

DIAMOND FILMS;

EID: 0031995203     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00240-9     Document Type: Article

References (15)

1. W.A. Weimer, F.M. Cerio, C.E. Johnson, J. Mater. Res. 6 (10) (1991) 2134.
2. Y. Liou, R. Weimer, D. Knight, R. Messier, Appl. Phys. Lett. 56 (5) (1990) 437.
3. S.J. Harris, A.M. Weiner, J. Appl. Phys. 67 (1990) 6520.
4. Y. Liou, Y.R. Ma, Diamond Relat. Mater. 3 (1994) 573.
5. P.K. Backmann, H.J. Hagemann, H. Lade, D. Leers, F. Picht, D.U. Wiechert, H. Wilson, Mater. Res. Soc. Symp. Proc. 339 (1994) 267.
6. W.D. Cassidy, E.A. Evans, Y. Wang, J.C. Angus, P.K. Backmann, H.J. Hagemann, D. Leers, D.U. Wiechert, Mater. Res. Soc. Symp. Proc. 339 (1994) 285.
7. J.A. Mucha, D.L. Flamm, D.E. Ibbotson, J. Appl. Phys. 65 (9) (1989) 3448.
8. E.J. Corat, V.J. Trava-Airoldi, N.F. Leite, M.C.A. Nono, V. Baranauskas, J. Mater. Res. 32 (1997) 0001.
9. R.C. Mendes de Barros, E.J. Corat, V.J. Trava-Airoldi, N.G. Ferreira, N.F. Leite, K. Iha, Diamond Relat. Mater., in press.
10. N.G. Ferreira, E.J. Corat, V.J. Trava-Airoldi, N.F. Leite, R.C. Mendes de Barros, Diamond Relat. Mater., in press.
11. N.G. Ferreira, E.J. Corat, V.J. Trava-Airoldi, N.F. Leite, E. Del Bosco, Diamond Relat. Mater, submitted.
12. M. Allan, S.F. Wong, J. Chem. Phys. 74 (3) (1981) 1687.
13. G. Knoth, M. Gote, M. Rädle, K. Jung, H. Ehrhardt, Phys. Rev. Lett. 62 (15) (1989) 1735.
14. G. Knoth, M. Gote, M. Rädle, H. Ehrhardt, K. Jung, J. Phys. B: At. Mol. Opt. Phys. 22 (1989) 299.
15. R. Rhor, F. Linder, J. Phys. B: At. Mol. Phys. 9 (14) (1976) 2521.