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Volumn 29, Issue 1-2, 1998, Pages 99-114

Particle deposition on a rotating disk in application to vapor axial deposition (VAD) process

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY LAYERS; BROWNIAN MOVEMENT; COAGULATION; HEAT CONVECTION; MATHEMATICAL MODELS; PARTICLE SIZE ANALYSIS; ROTATING DISKS; TEMPERATURE DISTRIBUTION; THERMAL DIFFUSION; VAPOR DEPOSITION;

EID: 0031975433     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-8502(97)00038-4     Document Type: Article
Times cited : (10)

References (42)
  • 1
    • 0025231155 scopus 로고
    • Numerical analysis of thermophoretic transport in the OVD process
    • 90-HTD-130
    • Alam, M. K., Graham, G., Janakiraman, V. and Greaves, J. (1990) Numerical analysis of thermophoretic transport in the OVD process. ASME 90-HTD-130, 67-72.
    • (1990) ASME , pp. 67-72
    • Alam, M.K.1    Graham, G.2    Janakiraman, V.3    Greaves, J.4
  • 2
    • 0023244390 scopus 로고
    • Thermophoretic deposition of particles in optical fiber preform fabrication
    • 87-HT-6
    • Alam, M. K. and Mehrotra, S. (1987) Thermophoretic deposition of particles in optical fiber preform fabrication. ASME 87-HT-6, 1-7.
    • (1987) ASME , pp. 1-7
    • Alam, M.K.1    Mehrotra, S.2
  • 3
    • 0024185451 scopus 로고
    • Spontaneous raman spectroscopy in flames containing high concentrations of silica particles
    • Allendorf, M. D. and Palmer, R. E. (1990) Spontaneous Raman spectroscopy in flames containing high concentrations of silica particles. High Temp. Sci. 26, 45-58.
    • (1990) High Temp. Sci. , vol.26 , pp. 45-58
    • Allendorf, M.D.1    Palmer, R.E.2
  • 4
    • 0025623767 scopus 로고
    • Deposition of lognormally distributed aerosols accounting for simultaneous diffusion, thermophoresis and coagulation
    • Bai, H. and Biswas, P. (1990) Deposition of lognormally distributed aerosols accounting for simultaneous diffusion, thermophoresis and coagulation. J. Aerosol Sci. 21, 629-640.
    • (1990) J. Aerosol Sci. , vol.21 , pp. 629-640
    • Bai, H.1    Biswas, P.2
  • 5
    • 0025746834 scopus 로고
    • 2 aerosols in optical fiber manufacturing torches
    • 2 aerosols in optical fiber manufacturing torches. J. Aerosol Sci. 22, 667-675.
    • (1991) J. Aerosol Sci. , vol.22 , pp. 667-675
    • Bautista, J.R.1    Atkins, R.M.2
  • 6
    • 0010676990 scopus 로고
    • Particle size measurement in optical waveguide manufacturing torches using dynamic light scattering
    • Bautista, J. R., Potkay, E. and Scatton, D. L. (1988) Particle size measurement in optical waveguide manufacturing torches using dynamic light scattering. Mat. Res. Symp. Proc. 117, 151-156.
    • (1988) Mat. Res. Symp. Proc. , vol.117 , pp. 151-156
    • Bautista, J.R.1    Potkay, E.2    Scatton, D.L.3
  • 7
    • 0025378138 scopus 로고
    • Modeling heat and mass transfer in optical waveguide manufacture
    • Bautista, J. R., Walker, K. L. and Atkins, R. M. (1990) Modeling heat and mass transfer in optical waveguide manufacture. Chem. Engng Prog. 86, 47-52.
    • (1990) Chem. Engng Prog. , vol.86 , pp. 47-52
    • Bautista, J.R.1    Walker, K.L.2    Atkins, R.M.3
  • 8
    • 0026170355 scopus 로고
    • Design and verification of nearly ideal flow and heat transfer in a rotating disk chemical vapor deposition reactor
    • Breiland, W. G. and Evans, G. H. (1991) Design and verification of nearly ideal flow and heat transfer in a rotating disk chemical vapor deposition reactor. J. Electrochem. Soc. 138, 1806-1816.
    • (1991) J. Electrochem. Soc. , vol.138 , pp. 1806-1816
    • Breiland, W.G.1    Evans, G.H.2
  • 9
    • 0001210078 scopus 로고
    • Deposition of colloidal particles in stagnation-point flow
    • Chari, K. and Rajagopalan, R. (1985) Deposition of colloidal particles in stagnation-point flow. J. Chem. Soc. Faraday Trans. II 81, 1345-1366.
    • (1985) J. Chem. Soc. Faraday Trans. II , vol.81 , pp. 1345-1366
    • Chari, K.1    Rajagopalan, R.2
  • 10
    • 0030111020 scopus 로고    scopus 로고
    • Deposition of polydisperse particles in a falkner-skan wedge flow
    • Cho, C. Hwang, J. and Choi, M. (1996) Deposition of polydisperse particles in a Falkner-Skan wedge flow, J. Aerosol Sci. 27, 249-261.
    • (1996) J. Aerosol Sci. , vol.27 , pp. 249-261
    • Cho, C.1    Hwang, J.2    Choi, M.3
  • 11
    • 0024620141 scopus 로고
    • A mathematical model of the fluid mechanics and gas-phase chemistry in a rotating disk chemical vapor deposition reactor
    • Coltrin, M. E., Kee, R. J. and Evans, G. H. (1989) A mathematical model of the fluid mechanics and gas-phase chemistry in a rotating disk chemical vapor deposition reactor. J. Electrochem. Soc.: Solid-State Sci. Technol. 136, 819-829.
    • (1989) J. Electrochem. Soc.: Solid-state Sci. Technol. , vol.136 , pp. 819-829
    • Coltrin, M.E.1    Kee, R.J.2    Evans, G.H.3
  • 12
    • 0024753466 scopus 로고
    • Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow
    • Cooper, D. W., Peters, M. H. and Miller, R. J. (1989) Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow. Aerosol Sci. Technol. 11, 133-143.
    • (1989) Aerosol Sci. Technol. , vol.11 , pp. 133-143
    • Cooper, D.W.1    Peters, M.H.2    Miller, R.J.3
  • 13
    • 0027906311 scopus 로고
    • Numerical modeling of particle dynamics in a rotating disk chemical vapor deposition reactor
    • Davis, R. W., Moore, E. F. and Zachariah, M. R. (1993) Numerical modeling of particle dynamics in a rotating disk chemical vapor deposition reactor. J. Crystal Growth 132, 513-522.
    • (1993) J. Crystal Growth , vol.132 , pp. 513-522
    • Davis, R.W.1    Moore, E.F.2    Zachariah, M.R.3
  • 14
    • 0023453832 scopus 로고
    • A numerical model of the flow and heat transfer in a rotating disk chemical vapor deposition reactor
    • Evans, G. and Greif, R. (1987) A numerical model of the flow and heat transfer in a rotating disk chemical vapor deposition reactor. ASME J. Heat Transfer 109, 928-935.
    • (1987) ASME J. Heat Transfer , vol.109 , pp. 928-935
    • Evans, G.1    Greif, R.2
  • 15
    • 0024088356 scopus 로고
    • Forced flow near a heated rotating disk: A similarity solution
    • Evans, G. H. and Grief, R. (1988) Forced flow near a heated rotating disk: a similarity solution. Numer. Heat Transfer 14, 373-387.
    • (1988) Numer. Heat Transfer , vol.14 , pp. 373-387
    • Evans, G.H.1    Grief, R.2
  • 16
    • 84975575712 scopus 로고
    • In situ measurement of flame-formed silica particles using dynamic light scattering
    • Flower, W. L. and Hurd, A. J. (1987) In situ measurement of flame-formed silica particles using dynamic light scattering. Appl. Opt. 26, 2236-2239.
    • (1987) Appl. Opt. , vol.26 , pp. 2236-2239
    • Flower, W.L.1    Hurd, A.J.2
  • 18
    • 0020169376 scopus 로고
    • Particle deposition in a burner
    • Gourdin, W. H. and Andrejco, M. J. (1982) Particle deposition in a burner. J. Appl. Phys. 53, 5920-5925.
    • (1982) J. Appl. Phys. , vol.53 , pp. 5920-5925
    • Gourdin, W.H.1    Andrejco, M.J.2
  • 21
    • 0028320645 scopus 로고
    • Characterization of a vapor axial deposition (VAD) flame impinging on a disk for a study of electric field enhanced deposition
    • Hwang, J. and Daily, J. W. (1994) Characterization of a vapor axial deposition (VAD) flame impinging on a disk for a study of electric field enhanced deposition. Exper. Thermal Fluid Sci. 8, 58-66.
    • (1994) Exper. Thermal Fluid Sci. , vol.8 , pp. 58-66
    • Hwang, J.1    Daily, J.W.2
  • 22
    • 0002896465 scopus 로고
    • Electric field enhanced deposition in flame synthesized materials manufacturing
    • Hwang, J. and Daily, J. W. (1995) Electric field enhanced deposition in flame synthesized materials manufacturing. J. Aerosol Sci. 26, 5-18.
    • (1995) J. Aerosol Sci. , vol.26 , pp. 5-18
    • Hwang, J.1    Daily, J.W.2
  • 23
    • 0010671881 scopus 로고
    • International Mathematical and Statistical Libraries, User's Manual
    • IMSL (1987) Problem-solving software systems. International Mathematical and Statistical Libraries, User's Manual.
    • (1987) Problem-solving Software Systems
  • 27
    • 0026186906 scopus 로고
    • A mathematical model of the hydrodynamics and gas-phase reactions in silicon LPCVD in a single-wafer reactor
    • Kleijn, C. R. (1991) A mathematical model of the hydrodynamics and gas-phase reactions in silicon LPCVD in a single-wafer reactor. J. Electrochem. Soc. 138, 2190-2200.
    • (1991) J. Electrochem. Soc. , vol.138 , pp. 2190-2200
    • Kleijn, C.R.1
  • 28
    • 0021313609 scopus 로고
    • Coagulation rate of polydisperse particles
    • Lee, K. W. and Chen, H. (1984) Coagulation rate of polydisperse particles. Aerosol Sci. Technol. 3, 327-334.
    • (1984) Aerosol Sci. Technol. , vol.3 , pp. 327-334
    • Lee, K.W.1    Chen, H.2
  • 30
    • 0023486330 scopus 로고
    • Review of chemistry and mechanisms of deposition for optical waveguide fabrication by vapor-phase deposition from a combustion flame
    • Miller, T. J., Potkay, E. and Yuen, M. J. (1987) Review of chemistry and mechanisms of deposition for optical waveguide fabrication by vapor-phase deposition from a combustion flame. A.I.Ch.E. Symp. Ser. 83(258), 1-11.
    • (1987) A.I.Ch.E. Symp. Ser. , vol.83 , Issue.258 , pp. 1-11
    • Miller, T.J.1    Potkay, E.2    Yuen, M.J.3
  • 31
    • 0010716865 scopus 로고
    • Particle deposition of wafers: A comparison between modeling approaches
    • Peterson, T. W., Sannes, K. M., Stratmann, F. and Fissan, H. (1988) Particle deposition of wafers: a comparison between modeling approaches. J. Aerosol Sci. 19, 1409-1412.
    • (1988) J. Aerosol Sci. , vol.19 , pp. 1409-1412
    • Peterson, T.W.1    Sannes, K.M.2    Stratmann, F.3    Fissan, H.4
  • 33
    • 0024064150 scopus 로고
    • Simultaneous nucleation, condensation, and coagulation in aerosol reactors
    • Pratsinis, S. E. (1988) Simultaneous nucleation, condensation, and coagulation in aerosol reactors. J. Colloid Interface Sci. 124, 416-427.
    • (1988) J. Colloid Interface Sci. , vol.124 , pp. 416-427
    • Pratsinis, S.E.1
  • 35
    • 0023480374 scopus 로고
    • Manufacture of optical waveguides using aerosols, a rev
    • Senior, C. L. (1987) Manufacture of optical waveguides using aerosols, a rev. Particulate Sci. Technol 5, 13-26.
    • (1987) Particulate Sci. Technol , vol.5 , pp. 13-26
    • Senior, C.L.1
  • 36
    • 0000840408 scopus 로고
    • Suppression of particle deposition to surfaces by the thermophoretic force
    • Stratmann, F., Fissan, H., Papperger, A. and Friedlander, S. (1988) Suppression of particle deposition to surfaces by the thermophoretic force. Aerosol Sci. Technol. 9, 115-121.
    • (1988) Aerosol Sci. Technol. , vol.9 , pp. 115-121
    • Stratmann, F.1    Fissan, H.2    Papperger, A.3    Friedlander, S.4
  • 37
    • 0028272633 scopus 로고
    • Thermophoretic transport with application to external vapor deposition processes
    • Tsai, H. C. and Greif, R. (1994) Thermophoretic transport with application to external vapor deposition processes. Int. J. Heat Mass Transfer 37, 257-268.
    • (1994) Int. J. Heat Mass Transfer , vol.37 , pp. 257-268
    • Tsai, H.C.1    Greif, R.2
  • 38
    • 0029328742 scopus 로고
    • A study of thermophoretic transport in a reacting flow with application to external chemical vapor deposition processes
    • Tsai, H. C., Greif, R. and Joh, S. (1995) A study of thermophoretic transport in a reacting flow with application to external chemical vapor deposition processes. Int. J. Heat Mass Transfer 38, 1901-1910.
    • (1995) Int. J. Heat Mass Transfer , vol.38 , pp. 1901-1910
    • Tsai, H.C.1    Greif, R.2    Joh, S.3
  • 39
    • 0024944415 scopus 로고
    • Clean room application of particle deposition from stagnation flow: Electrostatic effects
    • Turner, J. R., Liguras, D. K. and Fissan, H. J. (1989) Clean room application of particle deposition from stagnation flow: electrostatic effects. J. Aerosol Sci. 20, 403-417.
    • (1989) J. Aerosol Sci. , vol.20 , pp. 403-417
    • Turner, J.R.1    Liguras, D.K.2    Fissan, H.J.3
  • 40
    • 0002107043 scopus 로고
    • Flame synthesis of fine particles
    • Ulrich, G. D. (1984) Flame synthesis of fine particles. Chem. Engng News 62, 22-29.
    • (1984) Chem. Engng News , vol.62 , pp. 22-29
    • Ulrich, G.D.1
  • 42
    • 0024910289 scopus 로고
    • Silica particle synthesis in a counterflow diffusion flame reactor
    • Zachariah, M. R., Chin, D., Semerjian, H. G. and Katz, J. L. (1989) Silica particle synthesis in a counterflow diffusion flame reactor. Combust. Flame 78, 287-298.
    • (1989) Combust. Flame , vol.78 , pp. 287-298
    • Zachariah, M.R.1    Chin, D.2    Semerjian, H.G.3    Katz, J.L.4


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