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Volumn 25, Issue 2, 1998, Pages 251-253
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Measurements of electron beam peak scatter factors
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Author keywords
Electron beam; Peak scatter factors
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Indexed keywords
DIODES;
ELECTRON BEAM LITHOGRAPHY;
ELECTRON BEAMS;
ELECTRONS;
IONIZATION CHAMBERS;
RADIATION DETECTORS;
SILICON DETECTORS;
FLUENCE CORRECTION FACTORS;
INCIDENT BEAMS;
INCIDENT ELECTRON BEAMS;
MEASUREMENTS OF;
SCATTER FACTOR;
SILICON DIODES;
STOPPING POWER;
WATER PHANTOM;
IONIZATION OF LIQUIDS;
ARTICLE;
ELECTRON BEAM;
IONIZATION CHAMBER;
PHOTON;
PRIORITY JOURNAL;
RADIATION DETECTOR;
RADIATION PHYSICS;
RADIATION SCATTERING;
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EID: 0031952107
PISSN: 00942405
EISSN: None
Source Type: Journal
DOI: 10.1118/1.598189 Document Type: Article |
Times cited : (2)
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References (10)
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