Reproducibility and accuracy of spatial measurements from digitally captured images in the environmental scanning electron microscope

Scanning

Volumn 20, Issue 2, 1998, Pages 83-86

  Cousens, D R ^a   Kinaev, N N ^a   Ranasinghe, M ^a  

^a UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

Calibration; Environmental scanning electron microscope; Scanning electron microscope; Spatial

Indexed keywords

ACCURACY; ARTICLE; CALIBRATION; HUMIDITY; IMAGE ANALYSIS; PRIORITY JOURNAL; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPY;

EID: 0031816290     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200203     Document Type: Article

References (3)

1. Danilatos GD: Introduction to the ESEM instrument. Microsc Res Techn 25, 354-361 (1993)
2. Postek MT: Critical issues in scanning electron microscope metrology. J Res NIST 99 (5), 641-671 (1994)
3. Postek MT, Vladár AE, Jones S. Keery WJ: Interlaboratory study on the lithography produced scanning electron microscope magnification standard prototype. J Res NIST 98 (4), 447-467 (1993)