95 GHz fT self-aligned selective epitaxial SiGe HBT with SMI electrodes

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 1998, Pages 312-313,-453

  Washio, K ^a   Ohue, E ^a   Oda, K ^a   Tanabe, M ^a   Shimamoto, H ^a   Onai, T ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL CIRCUITS; ELECTRODES; EMITTER COUPLED LOGIC CIRCUITS; EPITAXIAL GROWTH; FIBER OPTIC NETWORKS; FREQUENCY DIVIDING CIRCUITS; HETEROJUNCTION BIPOLAR TRANSISTORS; LOGIC GATES; MULTIPLEXING EQUIPMENT; OPTICAL COMMUNICATION; SEMICONDUCTING SILICON COMPOUNDS;

SILICON GERMANIDE;

OPTICAL LINKS;

EID: 0031710316     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)