Flexible silicon structures for a retina implant

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 515-519

  Trieu, H K ^a   Ewe, L ^a   Mokwa, W ^a   Schwarz, M ^a   Hosticka, B J ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTRODES; PLASMA ETCHING; SILICON; SINGLE CRYSTALS; SUBSTRATES;

WET CHEMICAL ETCHING;

IMPLANTS (SURGICAL);

EID: 0031707921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)