Film quality effects associated with formation of misfit dislocations at semiconductor interfaces

Applied Surface Science

Volumn 123-124, Issue , 1998, Pages 669-673

  Trukhanov, E M ^a   Kolesnikov, A V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; STRAIN; STRESS RELAXATION; SUBSTRATES; SURFACE PROPERTIES; VECTORS;

BURGERS VECTORS; MISFIT DISLOCATIONS;

HETEROJUNCTIONS;

EID: 0031706926     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00559-X     Document Type: Article

References (10)

1. J.W. Matthews, J. Vac. Sci. Technol. 12 (1975) 126.
2. J.W. Matthews, A.E.-J. Blakeslee, J. Cryst. Growth 27 (1974) 118.
3. E.M. Trukhanov, in: E.I. Givargizov, A.M. Melnikova (Eds.), Growth of Crystals, vol. 20, Plenum, New York, 1996, p. 29.
4. E.M. Trukhanov, Surface 2 (1995) 13, in Russian.
5. E.M. Trukhanov, Surface 2 (1995) 22, in Russian.
6. E.M. Trukhanov, A.V. Kolesnikov, G.A. Lubas, in: Proc. of 23rd Int. Symp. Compound Semiconductors, St. Petersburg, Russia. 1996, Inst. Phys. Conf. Ser. No. 155, IOP, 1997, ch. 3, p. 299.
7. J.P. Hirth, J. Lothe, Theory of Dislocations, McGraw-Hill, New York, 1968.
8. L.I. Datsenko, A.N. Gureev, N.F. Korotkevich et al., Thin Solid Films 7 (1971) 117.
9. V.N. Vasilevskaya, N.N. Soldatenko, Yu.A. Tkhorik, Thin Solid Films 7 (1971) 127.
10. Yu.A. Tkhorik, L.S. Khazan, Plastic Deformation and Misfit Dislocations in Heteroepitaxial Systems (in Russian), Naukova Dumka, Kiev, 1983, p. 135.